Content

1. Introduction to Nanotechnology
2. Fabrication of Nanomaterials I: Diversified characterization techniques in-situ and standard: SEM, EDS, Auger, XPS, RHEED, LEED
3. Several deposition techniques: PLD, IBD, Sputtering, Thermal Evaporator, CVD, ALD.
4. Fabrication of Nanomaterials II: Optical Lithography, E-beam lithography, Focused ion beam lithography, X-ray lithography, Etching techniques: wet and dry methods
5. Physical Properties I: Mechanical MEMS, NEMS, Mechanical properties of micro-machined structures, Devices and applications
6. Physical Properties II: : Electrical and Optical, Quantum wells/wires/dots, Size and confinement effects, Conduction electrons and dimensionality, Fermi gas and density of states (DOS),  Nanoelectronics, Nanophotonics, Excitons, Single electron tunneling, Superconductivity and Applications: sensors, lasers.

Practicals

• General characteristics and specifications for cleanrooms. Operating mode and support systems. General rules of operation and safety.
• Production of thin films by sputtering, thermal evaporation, ion and electron beams, and Plasma Enhanced Chemical Vapour Deposition (PECVD).
• Microlithography: production of masks for contact lithography and laser direct writing.
• Reactive plasma (dry-etching) micromachining. Micromachining of silicon in solution (wet-etching).
• Characterization techniques: optical and profilometry.
• Wire bonding. Cutting and polishing of substrates and devices.
• Fabrication of a functional microdevice.

Aims

• Technological importance of emerging nanotechnologies.
• Relation between physical size reduction and modification of physical properties
• Physical properties of nanostructures: mechanical, electronic, optical and magnetic.
• Applications of nanomaterials and nanodevices. 
• To be able to answer quantitative and qualitative questions about cleanrooms, micro and nanofabrication techniques.
• To be able to plan and execute experiments.
• To be able to perform literature searches, including critical assessment; development of correct oral and written expression.
• To be able to develop well defined mini-projects.

Further competences to be acquired
To be able to:

• apply correctly maths, science and engineering concepts
• plan and execute experiments and to perform data analysis
• develop teamwork skills
• identify, and solve problems in physics, chemistry and engineering
• identify processes and/or materials systems to achieve certain specifications
• communicate efficiently.

Recommended Books

• H. S. Nalwa (Ed.), “Nanostructured Materials and Nanotechnology”, Academic Press, 2002.
• C. P. Poole Jr. and F. J. Owens, “Introduction to Nanotechnology”, Wiley-Interscience, 2003.
• Z. Cui, “Micro-Nanofabrication: technologies and Applications”, Springer, 2005.
• K, Oura, V. G. Lifshits, A. A. Saranin, A. V. Zotov and M. Katayama, “Surface Science: An Introduction”, Springer, 2003.
• B. Bhushan (Ed.), “Handbook of Nanotechnology”, Springer, 2004.
• C. Dupas, P. Houdy and M. Lahmani, “Nanoscience”, Springer, 2004.     
• Madou MJ, Fundamentals of microfabrication: the science of miniaturization, CRC Press 2002.
• Rai-Choudry P, Handbook of Microlithography, Micromachining and Microfabrication, Vol 1,2, SPIE Press 1997.
• Franssila S, Introduction to Microfabrication, 2ªedição, Wiley 2010.

Teaching Staff

Paulo Marques (responsible)
André Pereira

Hours

Theoretical-practical classes (TP): Presentation of the curriculum using multimedia; specialized topics will be presented in lectures given by guests. Finally, the basic principle of the classes will be based on a discussion between students and teachers.

Practicals: The course teaching is based on a problem solving approach. Students, based on technical knowledge acquired by reading scientific papers and technical documents provided, plan the experiment, being supported by the teacher. The teachers also support the students in the realization of experiment and in the critical analysis of the results. The teacher should also discuss with students what are the most relevant results and those that should be the subject of a more detailed analysis.

The assessment consists of four distinct components: Final Exam (50%), Continuous evaluation (5%), individual essay (25%), oral presentation of work and oral questions about micro and nanofabrication techniques (20 %).
A minimum grade of 7.0/20 in each component is mandatory.

Grading System

42 h (30h theoretical-practical + 12h practicals)