- Introduction to Nanotechnology
- Fabrication of Nanomaterials I: Diversified characterization techniques in-situ and standard: SEM, EDS, Auger, XPS, RHEED, LEED
- Several deposition techniques: PLD, IBD, Sputtering, Thermal Evaporator, CVD, ALD.
- Fabrication of Nanomaterials II: Optical Lithography, E-beam lithography, Focused ion beam lithography, X-ray lithography, Etching techniques: wet and dry methods
- Physical Properties I: Mechanical MEMS, NEMS, Mechanical properties of micro-machined structures, Devices and applications
- Physical Properties II: : Electrical and Optical, Quantum wells/wires/dots, Size and confinement effects, Conduction electrons and dimensionality, Fermi gas and density of states (DOS), Nanoelectronics, Nanophotonics, Excitons, Single electron tunneling, Superconductivity and Applications: sensors, lasers.
- General characteristics and specifications for cleanrooms. Operating mode and support systems. General rules of operation and safety.
- Production of thin films by sputtering, thermal evaporation, ion and electron beams, and Plasma Enhanced Chemical Vapour Deposition (PECVD).
- Microlithography: production of masks for contact lithography and laser direct writing.
- Reactive plasma (dry-etching) micromachining. Micromachining of silicon in solution (wet-etching).
- Characterization techniques: optical and profilometry.
- Wire bonding. Cutting and polishing of substrates and devices.
- Fabrication of a functional microdevice.
- Technological importance of emerging nanotechnologies.
- Relation between physical size reduction and modification of physical properties
- Physical properties of nanostructures: mechanical, electronic, optical and magnetic.
- Applications of nanomaterials and nanodevices.
- To be able to answer quantitative and qualitative questions about cleanrooms, micro and nanofabrication techniques.
- To be able to plan and execute experiments.
- To be able to perform literature searches, including critical assessment; development of correct oral and written expression.
- To be able to develop well defined mini-projects.
Further competences to be acquired
To be able to:
- apply correctly maths, science and engineering concepts
- plan and execute experiments and to perform data analysis
- develop teamwork skills
- identify, and solve problems in physics, chemistry and engineering
- identify processes and/or materials systems to achieve certain specifications
- communicate efficiently.
- H. S. Nalwa (Ed.), “Nanostructured Materials and Nanotechnology”, Academic Press, 2002.
- C. P. Poole Jr. and F. J. Owens, “Introduction to Nanotechnology”, Wiley-Interscience, 2003.
- Z. Cui, “Micro-Nanofabrication: technologies and Applications”, Springer, 2005.
- K, Oura, V. G. Lifshits, A. A. Saranin, A. V. Zotov and M. Katayama, “Surface Science: An Introduction”, Springer, 2003.
- B. Bhushan (Ed.), “Handbook of Nanotechnology”, Springer, 2004.
- C. Dupas, P. Houdy and M. Lahmani, “Nanoscience”, Springer, 2004.
- Madou MJ, Fundamentals of microfabrication: the science of miniaturization, CRC Press 2002.
- Rai-Choudry P, Handbook of Microlithography, Micromachining and Microfabrication, Vol 1,2, SPIE Press 1997.
- Franssila S, Introduction to Microfabrication, 2ªedição, Wiley 2010.